Dynamical properties of tertiarybutylarsine on GaAs(001) surface

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• 作者：Ozeki ; M. ; Ohashi ; M. ; Tanaka ; Y.
• 关键词：34.50.Dy ; 34.50.Ez ; 34.50.Lf ; Molecule-solid scattering ; Gallium arsenide ; Tertiarybutylarsine
• 刊名：Nuclear Instruments and Methods in Physics Research Section B ; Beam Interactions with Materials and Atoms
• 出版年：2002
• 期刊代码：42_0168583x
• 类别：ph
• 出版时间：June, 2002
• 卷：193
• 期：1-4
• 页码：485-489
• 文件大小：132 K

摘要

The dynamical properties of tertiarybutylarsine (TBA) was studied on GaAs(001) surface using a supersonic molecular beam. The temperature and incident energy dependence of the reflected beam revealed a reaction channel of TBA on GaAs surface with a large decrease in the activation energy from 2.7 to 1.8 eV as the incident energy increases from 0.04 to 2.5 eV.