Effect of laser power on orientation and microstructure of Ba₂TiO₄ film prepared by laser chemical vapor deposition

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• 作者：Dongyun Guo^a ; ^b ; ^{guodongyun@gmail.com} ; Takashi Goto^b ; Chuanbin Wang^a ; Qiang Shen^a ; Lianmeng Zhang^a
• 关键词：Ba2TiO4 film ; Laser chemical vapor deposition ; Orientation ; Laser power
• 刊名：Applied Surface Science
• 出版年：2012
• 期刊代码：6_01694332
• 类别：ms
• 出版时间：1 August, 2012
• 卷：258
• 期：20
• 页码：7860-7863
• 文件大小：528 K

摘要

Ba₂TiO₄ films were prepared on Pt/Ti/SiO₂/Si substrates by laser chemical vapor deposition method. The effect of laser power (P_L) on orientation and microstructure was investigated. With increasing P_L from 52 to 93 W, the deposition temperature (T_dep) increased from 845 to 946 K. With increasing T_dep from 845 to 927 K, the preferred orientation of Ba₂TiO₄ films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T_dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba₂TiO₄ film prepared at 881 K had high deposition rate (R_dep) of 51.4 渭m h^鈭?, which was advantageous to industrial production.