摘要
We have used coaxial impact collision ion scattering spectroscopy (CAICISS), low energy electron diffraction (LEED) and X-ray photoelectron spectroscopy (XPS) to investigate the influence of atomic hydrogen cleaning (AHC) on the composition and structure of MBE grown InN(0 0 0 1) surfaces. Evaluation of the CAICISS data showed that metallic In droplets formed during non-optimised AHC, while LEED indicated a well ordered surface and XPS revealed residual C and O contaminations. Careful comparison of simulated and experimental polar angle scans of the CAICISS data revealed that the observed polar angle peak at 58° is solely related to the formation of metallic In on the InN surface.