Tin (Sn) adsorption on Si(1 0 0) surface has been studied by scanning tunneling microscopy (STM) and co-axial impact collision ion scattering spectroscopy (
CAICISS). The
c(8×4) and
(5×1) phases were analyzed to reveal their atomic structure. It has been confirmed that the
c(8×4) structure consists of buckled Sn dimers. The
(5×1) structure has been found to be partially irregular along
(5×1) rows and to consist of double Sn layer. The Sn atoms in the first layer are undimerised while those in second layer form asymmetric dimers.