Deposition of iron sulfide thin films by AACVD from single source precursors

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• 作者：Masood Akhtar ; Ahmed Lutfi Abdelhady ; M. Azad Malik ; Paul O'Brien ; ^{paul.obrien@manchester.ac.uk}
• 关键词：A1. Crystallites ; A1. Substrates ; A3. Aerosol assisted chemical vapor deposition (AACVD) ; B1. Cubic pyrite ; B1. Hexagonal pyrrhotite ; B1. tris(dialkyldithiocarbamato)iron(III)
• 刊名：Journal of Crystal Growth
• 出版年：2012
• 期刊代码：49_00220248
• 类别：ch
• 出版时间：1 May, 2012
• 卷：346
• 期：1
• 页码：106-112
• 文件大小：2103 K

摘要

The unsymmetrical [Fe(S₂CNEtⁱPr)₃] (1), [Fe(S₂CNEtMe)₃] (2) and symmetrical [Fe(S₂CN(Hex)₂)₃] (3), [Fe(S₂CN(Et)₂)₃] (4) tris(dialkyldithiocarbamato)iron(III) complexes were used as single source precursors for the deposition of iron sulfide thin films by the aerosol assisted chemical vapor Deposition (AACVD) method. The unsymmetrical complexes deposited the mixed phases (pyrite and marcasite) at all deposition temperatures except the complex (2) which deposited pyrite and pyrrhotite at 400 掳C. The symmetrical complex (3) with longer alkyl groups produced a mixture of pyrite and pyrrhotite phases at 350 and 450 掳C but pyrite and mackinawite at 400 掳C whereas the complex (4) with shorter alkyl groups deposited a mixture of pyrite and marcasite at 350 掳C but a pure pyrrhotite phase at 400 and 450 掳C.