High quality single-walled carbon nanotube synthesis using remote plasma CVD

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• 作者：Toshiyuki Ohashi^a ; ^{toshiyuki_ohashi@n.f.rd.honda.co.jp} ; Ryogo Kato^b ; Takumi Ochiai^b ; Toshio Tokune^a ; Hiroshi Kawarada^b
• 关键词：Single-walled carbon nanotubes ; Chemical vapor deposition (CVD) ; Remote plasma CVD ; Carbon monoxide ; Cobalt catalyst ; Ion bombardment
• 刊名：Diamond and Related Materials
• 出版年：2012
• 期刊代码：30_09259635
• 类别：ms
• 出版时间：April, 2012
• 卷：24
• 期：Complete
• 页码：184-187
• 文件大小：1023 K

摘要

Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH₄/H₂ previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.