Characterization of a sandwich-type large CVD single crystal diamond particle detector fabricated using a lift-off method

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• 作者：Nobuteru Tsubouchi^a ; ^{nobu-tsubouchi@aist.go.jp} ; Y. Mokuno^a ; A. Kakimoto^b ; Y. Konno^b ; H. Yamada^a ; A. Chayahara^a ; J.H. Kaneko^b ; F. Fujita^b ; S. Shikata^a
• 关键词：CVD ; Single crystal diamond ; Freestanding ; Lift-off process ; Crystallinity
• 刊名：Diamond and Related Materials
• 出版年：2012
• 期刊代码：30_09259635
• 类别：ms
• 出版时间：April, 2012
• 卷：24
• 期：Complete
• 页码：74-77
• 文件大小：800 K

摘要

Crystallinity of a freestanding large (size: ~ 9 脳 7 mm) undoped single crystal (SC) diamond film grown by plasma chemical vapor deposition (CVD) and radiation response of a sandwich-type radiation detector made from this SC plate to 伪 particles were investigated. The freestanding SC film was formed by elimination of a substrate using a so-called 鈥渓ift-off method鈥?after the growth of a thick-film on a pre-ion-implanted substrate. The formed SC plate has a high optical transparency, indicating no remarkable optical absorption seen in the wavelength from ultraviolet to near-infrared region. In the energy spectra of 5.486 MeV 伪-particles, relatively sharp peaks were observed for both hole and electron transits. For the hole transit, the peak resolution of the pulse height distribution and charge collection efficiency (CCE) were ~ 0.7%and 98%, respectively. On the other hand, for the electron transit, the peak resolution and CCE obtained were ~ 4.4%and 89%, respectively. In the photoluminescence spectrum at room temperature, a strong sharp peak around 235 nm corresponding to free exciton and a weak visible band mainly related to nitrogen-vacancy complex were observed. The spectral width of the (004) plane X-ray rocking curve was 16.5鈥? The micrograph taken using crossed-polarizers demonstrated that there are some white regions and four-petaled patterns, originating from internal strain and most likely threading dislocations, respectively.