A volatile Pb(II) β-Diketonate diglyme complex as a promising precursor for MOCVD of lead oxide films

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• 作者：Malandrino ; Graziella ; Lo Nigro ; Raffaella ; Rossi ; Patrizia ; Dapporto ; Paolo ; Fragalà ; Ignazio L.
• 关键词：Lead complexes ; MOCVD ; PbO films ; Thermal behaviors ; Crystal structures
• 刊名：Inorganica Chimica Acta
• 出版年：2004
• 期刊代码：40_00201693
• 类别：ch
• 出版时间：November 1, 2004
• 卷：357
• 期：13
• 页码：3927-3933
• 文件大小：306 K

摘要

A polyether adduct of the lead(II) hexafluoroacetylacetonate has been synthesized and characterized by elemental analysis, NMR spectroscopy, mass spectrometry and infrared spectroscopy. The single crystal X-ray diffraction study provides evidence of a dimeric structure of the type [Pb(hfa)₂·diglyme]₂ (Hhfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme=CH₃O(CH₂CH₂O)₂CH₃). The thermal analyses have revealed high volatility and good thermal stability with a low residue despite the dimeric nature of the adduct. This novel compound has been successfully applied as a precursor for the depositions of PbO films. It represents the first example of lead precursors that can be used in the liquid phase without decomposition, thus providing constant evaporation rates even for very long deposition times.