Progress and problems for atomic-resolution electron microscopy

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• 作者：David J. Smith ; ^{david.smith@asu.edu}
• 关键词：Atomic-resolution electron microscopy ; Spherical aberration ; Aberration correction ; Information limit ; Microscope performance
• 刊名：Micron
• 出版年：2012
• 期刊代码：37_09684328
• 类别：ph
• 出版时间：March, 2012
• 卷：43
• 期：4
• 页码：504-508
• 文件大小：213 K

摘要

The performance of the high-resolution electron microscope has continued to evolve, with recent developments in hardware attachments enabling aberration correction to be directly achieved for both probe-corrected and image-corrected microscope geometries. Sub-脜ngstrom resolution, once regarded as an unattainable dream, can nowadays be readily achieved with instruments that are being widely sold commercially. These instrumentation developments have played a central role in facilitating transformational advances in imaging (and analytical) capability, bringing both novel opportunities and fresh challenges for the electron microscopy community. This paper provides a short update of recent progress in atomic-resolution TEM and STEM imaging, and briefly discusses some of the associated issues and problems attracting close attention.