Dielectric, ferroelectric and piezoelectric properties of 100-oriented Pb_0.4Sr_0.6TiO₃ thin film sputtered on LaNiO₃ electrode

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• 作者：Xiuyun Lei^a ; Denis Ré ; miens^b ; Nossikpendou Sama^b ; Ying Chen^a ; Chaoliang Mao^a ; Xianlin Dong^a ; Genshui Wang^a ; ^{genshuiwang@mail.sic.ac.cn}
• 关键词：A1. Characterization ; A3. Magnetron sputtering ; B1. Perovskites ; B2. Dielectric materials ; B2. Piezoelectric materials
• 刊名：Journal of Crystal Growth
• 出版年：2012
• 期刊代码：49_00220248
• 类别：ch
• 出版时间：15 May, 2012
• 卷：347
• 期：1
• 页码：15-18
• 文件大小：516 K

摘要

Pb_0.4Sr_0.6TiO₃/LaNiO₃ (PST/LNO) thin film with a perfect (100) orientation was deposited on SiO₂/Si substrate by magnetron sputtering method. Both Pt and LNO top electrodes have been prepared on this film to investigate the electrical properties. The dielectric constant and piezoelectric coefficient significantly increase while the average coercive field is strongly lowered when LNO is used as the top electrode. A large tunability of 77%(@300 kV/cm) and low loss factor of 2.85%were obtained. Also, a maximum and remnant piezoelectric coefficients (d_33max.eff. and d_33rem.eff.) values of 90 pm/V and 47 pm/V were observed. These measured properties indicate that the PST thin film is a multi-functional material, which is a promising candidate for piezoelectric applications and for tunability devices.