A comparative evaluation of surface morphology, cohesive and adhesive properties of one-step and two-step thermal deposited chromium thin films on glass substrates

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• 作者：A. Lazauskas^a ; ^{Algirdas.LAZAUSKAS@stud.ktu.lt} ; V. Grigali奴nas^a ; ¹ ; ^{Viktoras.GRIGALIUNAS@ktu.lt} ; F. Ecarla^b ; ² ; ^{Fanny.ECARLA@csm-instruments.com} ; M. Caunii^b ; ^{Mihaela.CAUNII@csm-instruments.com}
• 关键词：Chromium films ; Thermal deposition ; Oxygen plasma ; AFM ; Scratch test
• 刊名：Applied Surface Science
• 出版年：2012
• 期刊代码：6_01694332
• 类别：ms
• 出版时间：15 July, 2012
• 卷：258
• 期：19
• 页码：7633-7638
• 文件大小：1044 K

摘要

The surface morphology, cohesive and adhesive properties of one-step and two-step thermal deposited chromium thin films are investigated. Surface characterization is followed by the atomic force microscopy topography images, surface morphology parameters, height distribution histograms and bearing ratio curves with hybrid parameters. Cohesive and adhesive properties of the deposited chromium thin films were evaluated by scratch tests using the progressive loading followed with optical microscopy inspection. The two-step thermal deposition of chromium thin films followed by O₂ plasma treatment after the first deposition gives better mechanical strengths as compared with conventional thermal deposition process. The changes involved in reflectance behavior of the films in UV/vis range are discussed.