Silicon diodes with large aspect ratio 3D microstructures backfilled with 6LiF show a significant increase in neutron detection efficiency beyond that of conventional thin-film coated planar devices. Described in this work are advancements in the technology using detector stacking methods and summed-detector 6脳6-element arraying methods to dramatically increase the sensitivity to thermal neutrons. The intrinsic detection efficiency of the 6脳6 array for normal-incident 0.0253 eV neutrons was found 6.8%compared against a calibrated 3He proportional counter.