Ferroelectric PbTiO₃ films grown by pulsed liquid injection MOCVD

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• 作者：A. Bartasyte ; R. Bouregba ; E. Dogheche ; M. Boudard ; G. Poullain ; O. Chaix-Pluchery ; C. Jimenez ; V. Plausinaitiene ; D. Remiens ; A. Abrutis ; Z. Saltyte ; F. Weiss
• 关键词：MOCVD ; PbTiO₃ films ; Ferroelectric and piezoelectric properties
• 刊名：Surface and Coatings Technology
• 出版年：2007
• 期刊代码：106_02578972
• 类别：ms
• 出版时间：25 September 2007
• 卷：201
• 期：22-23
• 页码：9340-9344
• 文件大小：369 K

摘要

The influence of deposition conditions (pressure, growth rate, solution concentration, etc.) on the growth of ferroelectric PbTiO₃ films by pulsed liquid injection MOCVD was examined. Pb(thd)₂ and Ti(OⁱPr)₂(thd)₂ (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate) dissolved in toluene were used as precursors. Films were grown on LaAlO₃ (001) substrates for deposition process optimisation. PbTiO₃/La_{1 − x}Sr_xMnO₃/LaAlO₃ heterostructures were elaborated at optimized deposition conditions. The microstructure of the heterostructures was characterized by X-ray Diffraction and by Raman spectroscopy. Pt/PbTiO₃/La_{1 − x}Sr_xMnO₃/LaAlO₃ structures were used for ferroelectric, dielectric and piezoelectric characterisations of PbTiO₃ films.