The freon flooding technique in SIMS analysis

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• 作者：Sielanko ; J. ; Filiks ; J. ; Sowa ; M. ; Zinkiewicz ; J. ; Drewniak ; M.
• 刊名：Vacuum
• 出版年：1995
• 期刊代码：83_0042207x
• 类别：ph
• 出版时间：December, 1995
• 卷：46
• 期：12
• 页码：1459-1460
• 文件大小：186 K

摘要

The efficiency of the positive secondary ion emission when exposing Cu and stainless steel samples to a freon 12 (CF₂Cl₂) gas under Cs⁺ ion bombardment has been investigated. The results show a significant enhancement of secondary positive ion yield in both cases. For the Cu sample a much greater enhancement was found under the freon gas flooding in comparison with that under oxygen.