Nanophotonic crystals with chiral elements by a hot embossing process in SU-8
- 作者：Bing-Rui Lu ; Jing Wan ; Shen-Qi Xie ; Zhen Shu ; Yan Sun ; Yifang Chen ; Xin-Ping Qu ; Ran Liu
- 关键词：Hot embossing ; SU-8 ; Nanophotonic crystals ; Diffraction activities
- 刊名：Microelectronic Engineering
- 出版年：2008
- 期刊代码：91_01679317
- 类别：cp
- 出版时间：May-June 2008
- 卷：85
- 期：5-6
- 页码：866-869
- 文件大小：771 K
摘要
We report a novel nanoprocess to fabricate 2D metallic and non-metallic nanophotonic crystals on SU-8 using hot embossing combining with a UV-curing process. The fabricated photonic crystals were characterized by optical diffraction experiments. Theoretical simulation of the light diffraction through such kind of artificial crystals agrees with the measured optical property very well, indicating that the developed fabrication technique is able to produce large area nanosize photonic crystals at economic costs. The success of this work not only provides scientists with a good opportunity to pioneer novel photonic physics in metallic and non-metallic chiral as well as photonic crystal systems, but also bridges the gap between laboratory and industrial application for mass production of photonic nanostuctures.