Simulation of mechanical properties of diamond membrane for application to electron beam extraction window
- 作者：S. Shikata ; T. Yamada
- 关键词：Diamond ; Membrane ; EB ; Window ; NCD
- 刊名：Diamond and Related Materials
- 出版年：2008
- 期刊代码：30_09259635
- 类别：ms
- 出版时间：April-May 2008
- 卷：17
- 期：4-5
- 页码：794-798
- 文件大小：945 K
摘要
The use of diamond as the extraction window membrane for electron beam (EB) irradiation systems has been investigated by preliminary experiments and static simulations. The EB transmission characteristics of a fabricated 1.1 μm thick poly-crystalline diamond membrane were evaluated. A very high EB transmittance was observed, up to 70%at a 28 KeV accelerating voltage. Static simulations of EB extraction through a diamond membrane with a Si support have been carried out, under conditions from vacuum to atmosphere. Compared with Si, diamond/Si suffers a higher stress and strain, but, the displacement of a diamond film is much smaller. These results form a basis for the application of thin film, nanocrystalline and ultranano crystalline diamond on Si in the realization of the next generation miniature EB irradiation systems.