Investigation on the microstructure and magnetic properties of FePt films prepared by sequentially sputtering
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摘要
The FePt films were deposited with [Fe/Pt]n multilayer structure on preheated glass substrate by sequentially sputtering Fe and Pt layer in a magnetron sputtering system. The dependence of FePt's texture and magnetic properties on the multilayer structure was investigated. The XRD patterns indicate that FePt (111) texture are dominant for all [Fe/Pt]n multilayer films. However, the magnetic hysteresis (M-H) loops show that the samples with n = 16 and 20 exhibit an obvious perpendicular anisotropy. The X-ray photoelectron spectroscopy (XPS) measurement results indicate that there are composition interfaces in the films. According to the micromagnetics simulation, it is concluded that the enhanced perpendicular magnetic anisotropy originates from the interface anisotropy, owing to the existence of the composition interfaces in the films.

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