Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters

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• 作者：M. Renaud ; K. Karakaya ; T. Sterken ; P. Fiorini ; C. Van Hoof ; R. Puers
• 关键词：Vibration ; Energy harvester ; Piezoelectricity ; MEMS
• 刊名：Sensors and Actuators A ; Physical
• 出版年：2008
• 期刊代码：160_09244247
• 类别：et
• 出版时间：July-August 2008
• 卷：145-146
• 期：Complete
• 页码：380-386
• 文件大小：613 K

摘要

Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. They are characterized by applying a sinusoidal oscillation as mechanical input and by using a resistive load to measure the output power of the system. A maximum output power of 40 ;c;W has been measured for a PZT based harvester excited by an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. Preliminary experimental results on AlN based devices are also presented. A model capable of estimating the output power as a function of material parameters and device dimensions has been developed. Theoretical estimations have been compared with experimental results.