This paper presents the X-ray Photoelectron Spectroscopy (XPS) analysis for the undegraded and degraded Gdb>2b>Ob>2b>S:Tb3+ thin film phosphor. The thin films were grown with the pulsed laser deposition (PLD) technique. XPS measurements were done on Gdb>2b>Ob>2b>S:Tb3+ phosphor thin films before and after electron degradation. The XPS technique has proven the presence of Gdb>2b>Ob>3b> on the degraded and undegraded thin film spots. The presence of the SOb>2b> bonding was also detected after degradation. This clearly indicates that surface reactions did occur during prolonged electron bombardment in an oxygen atmosphere.