Ionization effect to plasma expansion study during nanosecond pulsed laser deposition
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摘要
The dynamic characteristic and effects of plasma play an important role in film growth process of pulsed laser deposition (PLD). Based on numerical hydrodynamic modeling, supposed the laser radiation and partial ionization of the plasma as a dynamic source, we deduce a set of new plasma expansion dynamics equations. Based on which, as an example of carbon target, using finite difference method, the plasma flow dynamics evolvement in vacuum is investigated. Our results show the dynamic partial ionization increases the expansion in all directions, which changes into a new dynamic source for plasma expansion. In the axial direction, because of the collisional interactions between particles, the plume density peak is in the vicinity of the target surface and the acceleration of plasma occurs mainly near the target surface too. In the transverse direction, the plume peak is not near the target, but at the surface. The space expansion distance is far less than the axial direction because there is no high initial velocity component in this direction. The predictions of the plasma expansion action based on the proposed dynamics source assumption are found to be in agreement with the experimental observation.

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