Effect of ion cleaning pretreatment on interface microstructure, adhesive strength and tribological properties of GLC coatings on Al substrates

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• 作者：Dichun Chen^a ; ^{chunzi_79@163.com} ; Bailing Jiang^b ; Huiying Shi^b ; Yanni Long^b
• 关键词：Ion cleaning ; GLC ; Al substrate ; Interface microstructure ; Adhesion ; Magnetron sputtering
• 刊名：Vacuum
• 出版年：2012
• 期刊代码：83_0042207x
• 类别：ph
• 出版时间：27 April, 2012
• 卷：86
• 期：10
• 页码：1576-1582
• 文件大小：1574 K

摘要

In this work, a series of ion cleaning procedures (bias and time) were performed on aluminum substrate surface prior to the deposition of graphite-like carbon (GLC) coatings. Special attention has been paid on the interface microstructure, coating/substrate bonding strength and tribological properties. It was found that ion cleaning critically influenced the adhesion and the wear resistance of GLC coatings. The optimization of ion cleaning pretreatment revealed that 400聽V/30聽min is the best ion cleaning conditions. HRTEM observations on the interfacial region showed that the oxide layer has been removed completely, a strong bonding diffusion interface formed. However, for the low energy ion cleaning (300聽V/10聽min), TEM observations on the interfacial region between the coating and the Al substrate showed that the oxide contamination still existed. The optimization of GLC layer thickness revealed that the GLC coating with 1聽渭m GLC layer exhibited the highest critical load and the lowest friction coefficient of 14.7聽N and 0.065, respectively.