Nanocomposite L1₀ FePt-SiN_x and FePt-SiN_x-C films with large coercivity and small grain size on a TiN intermediate layer

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• 作者：K.F. Dong^a ; ^{msedk@nus.edu.sg} ; H.H. Li^a ; Y.G. Peng^b ; G. Ju^b ; G.M. Chow^a ; J.S. Chen^a
• 关键词：TiN intermediate layer ; Small grain size ; Large coercivity
• 刊名：Journal of Magnetism and Magnetic Materials
• 出版年：2012
• 期刊代码：31_03048853
• 类别：ph
• 出版时间：August, 2012
• 卷：324
• 期：17
• 页码：2637-2644
• 文件大小：2236 K

摘要

FePt-SiN_x-C films with high coercivity, (001) texture and small grain size were obtained by co-sputtering FePt, Si₃N₄ and C on TiN/CrRu/glass substrate at 380 掳C. Without C doping, FePt-SiN_x films with good perpendicular anisotropy and a single layer structure were obtained. However, the grain size was still too large and the grain isolation was poor. When C was doped into the FePt-SiN_x films, the out-of-plane coercivity increased due to the decrease of the exchange coupling. In addition, the grain size of the FePt films decreased, and well-separated FePt grains with uniform size were formed. The microstructure of [FePt-SiN_x 40 vol%]鈭?0 vol% C films changed from a single layer structure to a multiple layer structure when the FePt thickness was increased from 4 to 10 nm. By optimizing the sputtering process, the [FePt (4 nm)-SiN_x 40 vol%]鈭?0 vol% C (001) film with coercivity higher than 21.5 kOe, a single layer structure, and small average FePt grain size of 5.6 nm was obtained, which makes it suitable for ultrahigh density perpendicular recording.