Influence of raw gases on B–C–N films prepared by electron beam excited plasma CVD

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• 作者：Hasegawa ; Takeshi ; Yamamoto ; Kazuhiro ; Kakudate ; Yozo
• 关键词：Plasma CVD ; B&ndash ; C&ndash ; N ; Bonding configurations ; Hardness
• 刊名：Diamond and Related Materials
• 出版年：2003
• 期刊代码：30_09259635
• 类别：ms
• 出版时间：March - July, 2003
• 卷：12
• 期：3-7
• 页码：1045-1048
• 文件大小：124 K

摘要

B–C–N films were deposited with electron beam excited plasma–chemical vapor deposition focusing on the structural stability where their compositions lie in the vicinity of BN. Film composition was controlled by varying process gas flow rates and was x