Refractory nanoporous materials fabricated using tungsten atomic layer deposition on silica aerogels

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• 作者：Anil U. Mane^a ; John P. Greene^a ; Jerry A. Nolen^a ; Uma Sampathkumaran^b ; Thomas W. Owen^b ; Ray Winter^b ; Jeffrey W. Elam^a ; ^{jelam@anl.gov}
• 关键词：Atomic layer deposition ; Aerogel ; Tungsten ; Spallation target ; Nanomaterial
• 刊名：Applied Surface Science
• 出版年：2012
• 期刊代码：6_01694332
• 类别：ms
• 出版时间：15 June, 2012
• 卷：258
• 期：17
• 页码：6472-6478
• 文件大小：1162 K

摘要

We report an approach for preparing refractory nanoporous materials using high surface area silica aerogels as templates for the growth of conformal tungsten (W) coatings by atomic layer deposition (ALD). Nanoporous silica aerogel monoliths were prepared with a variety of initial pore sizes and initial densities in the range of 0.3-0.5 g/cc using porogen extraction methods. Next, W ALD using Si₂H₆ and WF₆ reactants at 200 掳C was employed to coat the inner surfaces of the silica aerogels. After coating, scanning electron microscopy revealed a microstructure in which the ALD W completely encapsulated the silica aerogel micro-cells. The porosity of the aerogels was preserved during the first 10 W ALD cycles allowing the density to be controlled by adjusting the number of W ALD cycles to achieve densities as high as 5 g/cc. Nitrogen adsorption surface area measurements revealed a gradual decrease in the surface area of the silica aerogels with increasing numbers of W ALD cycles, consistent with a partial filling of the aerogel voids. The high density nanoporous tungsten monoliths survived high temperature vacuum heating (1500 掳C) making them promising candidates for solid rare-isotope catchers that can be used in the production of short-lived radioactive isotope beams in facilities such as the facility for rare isotope beams (FRIB).