摘要
The Cr,Ca:Y3Al5O12 (YAG) epitaxial thin films on YAG substrate have been fabricated by pulsed laser deposition (PLD) method. The chemical shifts of chromium ions in the Cr,Ca:YAG thin films is measured by X-ray photoelectron spectroscopy as a function of oxygen partial pressure in the PLD chamber. By measuring the fluorescence intensity of Cr4+ ions in Cr doped YAG thin films, it is found that the addition of Ca2+ ions as a charge compensator under oxygen background pressure increases the active Cr4+ ion fraction in the YAG thin film. The oxygen partial pressure of 2 mTorr is found optimum to maximize the Cr4+ number density in the Cr,Ca:YAG thin film. The Cr,Ca:GGG epitaxial thin film also shows the dependence of Cr4+ fluorescence on the oxygen partial pressure during deposition.