The interstitial oxygen molecules (O2) in SiO2 glass were detected down to 芒芒芒1015cm芒芒芒3 by photoluminescence of O2 at 1272nm excited at 765nm by a continuous-wave titanium sapphire laser. It was evidenced that SiO2 glass thermally annealed in air between 800 and 1100芒芒C spontaneously absorbs 芒芒芒1016cm芒芒芒3 of O2 from the ambient atmosphere. The time-dependent concentration change of the interstitial O2 allows the determination of both the diffusion coefficient and the solubility of the interstitial O2.