An intense broad vacuum ultraviolet (VUV) optical absorption band with peak at 6.8eV and halfwidth
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1.7eV is identified in irradiated glassy SiO
2 and assigned to dangling oxygen bonds (non-bridging oxygen hole centers, NBOHC). It was selectively created by photolysis of silanol (SiO–H) groups by 7.9eV photons of F
2 excimer laser at low temperature. Subsequent analysis by VUV absorption, time-resolved luminescence, and electron paramagnetic resonance spectroscopies during thermal annealing showed an exact correlation to the well-known 4.8 and 2eV absorption and 1.9eV luminescence bands of NBOHC. The estimated oscillator strength of the 6.8eV band is
f
0.05. This band may be one of the dominant causes of VUV optical absorption induced by excimer-laser irradiation of silica.