摘要
A pseudomorphic HEMT with a large InAs mole fraction (x) for the channel is fabricated successfully on a GaAs substrate by employing a thick Inx/2Ga1 - x/2As buffer layer. The transconductance increases with increasing InAs mole fraction, and shows a peak value at x = 0.4. The maximum transconductance and the cutoff frequency for a 1.7 μm gate HEMT with x = 0.4 were 500 mS mm−1 and 13.3 GHz, respectively. The effective saturation velocity evaluated using the cutoff frequency increased with increasing x.