Microstructures, mechanical properties, and tribological behaviors of Crx2013;Alx2013;N, Crx2013;Six2013;N, and Crx2013;Alx2013;Six2013;N coatings by a hybrid coating system
摘要
Crx2013;Alx2013;N, Crx2013;Six2013;N, Crx2013;Alx2013;Six2013;N coatings were successfully deposited on WCx2013;Co substrates by a hybrid coating system combining an arc ion plating technique using Cr target, and a magnetron sputtering method using Al and Si targets under N2/Ar atmosphere. XRD, HRTEM, and XPS analyses revealed that the synthesized Crx2013;Alx2013;N coatings consisted of solid-solution (Cr,Al)N crystallites, and the Crx2013;Six2013;N and Crx2013;Alx2013;Six2013;N coatings with Si content of 9 at.%were fine composites consisting of (Cr,Si)N and (Cr,Al,Si)N crystallites, respectively, embedded in an amorphous Si3N4/SiO2 matrix. The hardness values of the Crx2013;Six2013;N ( 35 GPa) and the Crx2013;Alx2013;Six2013;N ( 55 GPa) coatings were significantly increased compared with those of CrN ( 23 GPa) and Crx2013;Alx2013;N ( 25 GPa) coatings. Besides, the average friction coefficients of the Crx2013;Six2013;N ( 0.30) and the Crx2013;Alx2013;Six2013;N ( 0.57) coatings with Si content of about 9 at.%were largely decreased compared with those of CrN ( 0.50) and Crx2013;Alx2013;N ( 0.84) coatings. A comparative study on microstructural characteristics among Crx2013;Alx2013;N, Crx2013;Six2013;N, and Crx2013;Alx2013;Six2013;N coatings is reported in this paper.