Modeling and fabrication of micro tools by pulsed electrochemical machining

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• 作者：Ronnie Mathew ; Murali M. Sundaram ; ^{murali.sundaram@uc.edu}
• 关键词：Micromachining ; Tungsten tools ; Micro ECM
• 刊名：Journal of Materials Processing Technology
• 出版年：2012
• 期刊代码：102_09240136
• 类别：et
• 出版时间：July, 2012
• 卷：212
• 期：7
• 页码：1567-1572
• 文件大小：957 K

摘要

Accurate and precise micro tools are essential for the micromachining of complex micro features in a wide range of engineering materials including metals and ceramics. Existing micro tool fabrication processes suffer from drawbacks such as surface cracks, residual stress and deformations. Electrochemical machining of micro tools is proposed in this work to overcome these limitations. In this research, a mathematical model has been developed to predict the diameter of the micro tool fabricated. Experimental verification of the model using an in-house built micro electrochemical machining system reveals good correlation with theoretical predictions. Using the procedure described in this paper, very high aspect ratio (280-450) tungsten micro tools have been produced.