The topography of indium tin oxide (ITO) films with incorporated silver nanoparticles and irradiated by single pulses of 18 ns Nd:YAG laser has been investigated. The study was carried out with two Ag/ITO films having resistances of 50 Ω/ITO sheet and 4 Ω/ITO sheet. The periodic structures in both samples were created after the laser treatment. The photo-induced periodic structures have a different character while the sheet resistance plays a major role in the growth process of these structures. The results of optical and non-linear optical investigations lead us to the conclusion that the temporary polarization of samples during laser treatment is responsible for the shape of periodic structures.