Design and fabrication of aspherical bimorph PZT optics
- 作者：Tseng ; T.C. ; Chen ; S.-J. ; Yeh ; Z.C. ; Perng ; S.Y. ; Wang ; D.J. ; Kuan ; C.K. ; Chen ; J.R. ; Chen ; C.T.
- 关键词：42.79.&minus ; e ; Bimorph PZT ; Adaptive Optics ; Thin film resistor ; X-ray optics ; ANSYS ; Mirrors
- 刊名：Nuclear Instruments and Methods in Physics Research Section A ; Accelerators ; Spectrometers ; Detectors and Associated Equipment
- 出版年：2001
- 期刊代码：41_01689002
- 类别：ph
- 出版时间：July 21, 2001
- 卷：467-468
- 期：Part 1
- 页码：294-297
- 文件大小：132 K
摘要
Bimorph piezoelectric optics with a third-order-polynomial surface is designed and a prototype is fabricated as active optics. Two pairs of silicon (Si) and lead zirconate titanate (PZT) piezoelectric ceramic are bonded as Si–PZT–PZT-Si together with a multi-electrode or thin film resistor coating used as the control electrode between Si and PZT and metallic films as grounding between the interface of PZT ceramics. A linear voltage is applied to the bimorph PZT optics by probing the control electrodes from a two-channel controllable power supplier. In doing so, the optics surface can achieve a desired third-order-polynomial surface. Reducing hysteresis and creep in bimorph PZT X-ray optics is the only feasible way by inserting an appropriate capacitor in series with bimorph PZT optics to significantly reduce both effects.