摘要
A shear-mode piezoelectric accelerometer using YCa4O(BO3)3 single crystals (YCOB) was designed, fabricated and successfully tested for high temperature vibration sensing applications. Dynamic modeling of the accelerometer was presented first, followed by YCOB single crystal sample preparation, sensor assembly and experimental setup establishment. The prototyped accelerometer was tested at temperatures ranging from room temperature to 1000 掳C and at frequencies ranging from 50 Hz to 350 Hz. The sensitivity of the prototype was found to be 5.9 卤 0.06 pC/g throughout the tested frequency, temperature and acceleration ranges. In addition, YCOB piezoelectric accelerometers retained the same sensitivity at 1000 掳C for a dwell time of 9 h, exhibiting a high stability and reliability.