Quick determination of effective pumping speed for hydrogen permeation measurement
- 作者：L. Peksa and T. Gronych
- 关键词：Permeation measurement ; Pumping speed measurement
- 刊名：Vacuum
- 出版年：2006
- 期刊代码：83_0042207x
- 类别：ph
- 出版时间：24 October 2006
- 卷：81
- 期：3
- 页码：321-324
- 文件大小：208 K
摘要
The effective pumping speed for particular gas species has to be known in a vacuum system for measuring the absolute amount of this gas. The effective pumping speed for hydrogen during measurements of permeation can be readily determined, usually with sufficient accuracy, if the apparatus is equipped with a device enabling sudden reduction of pumping speed. This process is described.