Influence of carbon content on the microstructure and tribological properties of TiN(C) coatings in water lubrication

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• 作者：Qianzhi Wang^a ; Fei Zhou^a ; ^b ; ^c ; ^{fzhou@nuaa.edu.cn} ; ^{zhoufei88cn@yahoo.com.cn} ; Zhifeng Zhou^d ; Yang Yang^c ; Ce Yan^c ; Chundong Wang^c ; Wenjun Zhang^c ; Lawrence Kwok-Yan Li^d ; Igor Bello^c ; Shui-Tong Lee^c
• 关键词：TiN(C) coatings ; Microstructures ; Hardness ; Tribological properties ; Water lubrication
• 刊名：Surface and Coatings Technology
• 出版年：2012
• 期刊代码：106_02578972
• 类别：ms
• 出版时间：15 May, 2012
• 卷：206
• 期：18
• 页码：3777-3787
• 文件大小：2469 K

摘要

TiN(C) coatings with different carbon content were deposited on Si(100) wafers and 316L stainless steel disks using unbalance magnetron sputtering (UMS) from Ti and C targets in a mixture of N₂ and Ar gases. The microstructure and phase of TiN(C) coatings were observed and analyzed using field emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD), and the bonding structures of TiN(C) coatings were analyzed using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS). The friction and wear properties of TiN(C) coatings sliding against SiC balls in water were investigated using ball-on-disk tribometer, and the wear tracks of the TiN(C) coatings were observed using 3D-profilometer and FE-SEM. The results showed that the orientation of TiN (111) changed to TiN(100) with an increase in the C target current while the peak of TiC(400) was observed at the C target current beyond 2 A. When the C target current varied in the range of 1-3 A, the TiC, Ti(C,N),CN bonds were observed, whereas the DLC-rich area with CC bonds was detected as the C target current higher than 2 A. The hardness of TiN(C) coatings first increased to 32 GPa at the C target current of 1 A, and then decreased gradually with further increment in the C target current. The lowest friction coefficient of 0.24 and the lowest specific wear rate of 3.3 脳 10^鈭?#xA0;6 mm³/Nm were obtained simultaneously as the TiN(C) coatings were deposited at the C target current of 3 A.