High-bandwidth nanopositioner with magnetoresistance based position sensing
- 作者：Venkataraman Kartik
- 关键词：Nanopositioning ; Scanners ; Magnetoresistance sensors ; H&infin ; Control ; Atomic force microscopy
- 刊名：Mechatronics
- 出版年：2012
- 期刊代码：125_09574158
- 类别：et
- 出版时间：April, 2012
- 卷：22
- 期：3
- 页码：295-301
- 文件大小：1669 K
摘要
Nanopositioning is a key enabling technology for nanoscale metrology and manipulation. This paper details experimental studies aimed at achieving high-bandwidth nanopositioning through a combination of scanner design with excellent dynamical behavior, novel high-bandwidth position sensing, and modern control techniques. Through a combination of high stiffness/rigidity of the flexures, a low carried mass, and uncomplicated mechanical connections, an X/Y scanner is designed which has the first resonant frequencies beyond 4 kHz in both scan axes. For closed-loop operation of such fast scanners, there is a need for high-bandwidth, low-noise sensing schemes. A sensing concept based on magnetoresistance is presented that shows great potential towards providing low-noise position sensing over a very wide bandwidth. Atomic force microscopy imaging experiments of nanoscale structures are presented to illustrate the frame-per-second imaging capability of the nanopositioning system.