Plasma-treatment of MgO film in a.c. plasma display
- 作者：Lee ; Sung Ha ; Rhee ; Byung Joon ; Joo ; Min Ho ; Kang ; Jungwon ; Chung ; Jae Sang ; Park ; Myung-Ho
- 关键词：Plasma-treatment ; MgO ; Plasma display panels
- 刊名：Surface and Coatings Technology
- 出版年：2002
- 期刊代码：106_02578972
- 类别：ms
- 出版时间：July 1, 2002
- 卷：171
- 期：1-3
- 页码：247-251
- 文件大小：803 K
摘要
We studied the influence of the plasma-treatment on MgO film in plasma display panels by XPS, SEM and AFM analysis. With the plasma-treatment, adsorbed contaminants on MgO surface were removed and the surface topography was changed smoothly. We observed that the breakdown and sustained voltages of plasma-treated panels are stabilized more rapidly than those of non-treated panels.