Fabrication of a peristaltic PDMS micropump
- 作者：Ok Chan Jeong ; Sin Wook Park ; Sang Sik Yang and James Jungho Pak
- 刊名：Sensors and Actuators A ; Physical
- 出版年：2005
- 期刊代码：160_09244247
- 类别：et
- 出版时间：2005
- 卷：123-124
- 期：Complete
- 页码：453-458
- 文件大小：621 K
摘要
This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.