Improvements of ion implanted waveguides in Nd:YAG and LiNbO₃ using pulsed laser anneals

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• 作者：Vá ; zquez ; G.V. ; Townsend ; P.D.
• 关键词：Pulsed laser anneals ; Optical waveguides ; Surface SHG ; LiNbO₃ ; Nd ; YAG
• 刊名：Nuclear Instruments and Methods in Physics Research Section B ; Beam Interactions with Materials and Atoms
• 出版年：2002
• 期刊代码：42_0168583x
• 类别：ph
• 出版时间：May, 2002
• 卷：191
• 期：1-4
• 页码：110-114
• 文件大小：160 K

摘要

Pulsed laser annealing has been used to modify the surface and refractive index profiles of ion implanted waveguides formed in Nd:YAG and LiNbO₃ crystals. Major improvements are seen in the niobate guides where losses are reduced, better refractive index confinement occurs in the garnet. The improvements depend on laser pulse power and the number of pulses, since prolonged laser treatments can introduce surface damage in the niobate, and/or emphasise the problems of surface instability on the garnet. The improvements in waveguide loss and surface quality are encouraging and optimisation of the laser conditions should enhance the waveguide performances.