Cross sections and transport properties of positive ions in BF₃ plasmas

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• 作者：V.D. Stojanovi&#263 ; ^a ; ^{stoyanov@ipb.ac.rs} ; Z.M. Raspopovi&#263 ; ^a ; J.V. Jovanovi&#263 ; ^b ; S.B. Radovanov^c ; Ž ; .D. Nikitovi&#263 ; ^a ; Z.Lj. Petrovi&#263 ; ^a
• 关键词：Positive ions ; BF3 ; Plasma ; Transport coefficients ; Monte Carlo ; Cross section ; Non-conservative collisions
• 刊名：Nuclear Instruments and Methods in Physics Research Section B ; Beam Interactions with Materials and Atoms
• 出版年：2012
• 期刊代码：42_0168583x
• 类别：ph
• 出版时间：15 May, 2012
• 卷：279
• 期：Complete
• 页码：151-154
• 文件大小：654 K

摘要

Boron produced in plasma devices continues to be the main p-type dopant in ion implantation of semiconductor devices. Yet plasma parameters of most frequently used Boron rich gas, BF₃, are not well established. Time resolved measurements of ion energy distributions in the cathode boundary of a pulsed dc plasma doping system revealed possible role of the charge-transfer collisions between singly charged ions of various mass. The cross sections for scattering of B⁺, BF⁺ and ions on BF₃ molecule are calculated by using Nanbu鈥檚 theory separating elastic from reactive collisions. A Monte Carlo simulation technique was applied to perform calculations of transport parameters in DC electric fields.