Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

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• 作者：Tomá ; &scaron ; Homola^a ; ^b ; ^{homola@gimmel.ip.fmph.uniba.sk} ; Jind艡ich Matou&scaron ; ek^c ; Veronika Medvecká ; ^a ; Anna Zahoranová ; ^a ; Martin Kormunda^c ; Du&scaron ; an Ková ; 膷ik^a ; ^d ; Mirko 膶erná ; k^a ; ^d
• 关键词：Atmospheric diffuse plasma ; DCSBD ; Filament-free plasma ; ITO surface ; Cleaning ; XPS
• 刊名：Applied Surface Science
• 出版年：2012
• 期刊代码：6_01694332
• 类别：ms
• 出版时间：1 July, 2012
• 卷：258
• 期：18
• 页码：7135-7139
• 文件大小：579 K

摘要

Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology.