Preparation of Ba-Ti-O films by laser chemical vapor deposition

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• 作者：Akihiko Ito ; ^{itonium@imr.tohoku.ac.jp} ; Dongyun Guo ; Rong Tu ; Takashi Goto
• 关键词：A. Inorganic compound ; A. Ceramics ; B. Chemical vapor deposition ; D. Microstructure
• 刊名：Materials Chemistry and Physics
• 出版年：2012
• 期刊代码：58_02540584
• 类别：ms
• 出版时间：15 March, 2012
• 卷：133
• 期：1
• 页码：398-404
• 文件大小：1903 K

摘要

Ba-Ti-O films were prepared on Pt-coated Si substrate by laser chemical vapor deposition, and their orientations and microstructures were compared. Ba₂TiO₄, BaTiO₃, BaTi₂O₅, Ba₄Ti₁₃O₃₀ and BaTi₄O₉ single-phase films were prepared at Ti to Ba molar ratio from 0.41 to 3.49. The 伪鈥?Ba₂TiO₄ film showed (0 1 0) and (0 9 1) co-orientation with elongated, truncated columnar grains. The BaTiO₃ film was composed of triangular and hexagonal grains with slight (1 1 1) orientation. The BaTi₂O₅ film had (0 1 0) orientation and faceted columnar grains. The Ba₄Ti₁₃O₄₀ film showed (1 0 0) and (0 1 2) co-orientation with shellfish-like grains. The BaTi₄O₉ film showed (0 1 0) orientation with slightly rounded faceted columnar grains. The deposition rates of Ba-Ti-O films ranged from 30 to 144 渭m h^鈭?.