A structural study of amorphous In₂O₃–ZnO films by grazing incidence X-ray scattering (GIXS) with synchrotron radiation

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• 作者：Futoshi Utsuno ; Hiroyuki Inoue ; Yukio Shimane ; Tadao Shibuya ; Koki Yano ; Kazuyoshi Inoue ; Ichiro Hirosawa ; Masugu Sato ; Tetsuo Honma
• 关键词：Amorphous In₂O₃– ; ZnO ; Structure ; GIXS ; EXAFS ; Simulation ; Synchrotron radiation
• 刊名：Thin Solid Films
• 出版年：2008
• 期刊代码：78_00406090
• 类别：ph
• 出版时间：1 July 2008
• 卷：516
• 期：17
• 页码：5818-5821
• 文件大小：308 K

摘要

Grazing incidence X-ray scattering (GIXS) using synchrotron radiation is a very useful method for structural analysis of amorphous films. We investigated the structure of amorphous In₂O₃–ZnO films of three different Zn content (6.1, 10.7, 37.0 wt.%) utilizing GIXS and EXAFS at BL47XU in SPring-8. Radial distribution functions (RDFs) were obtained from the measurement data. Structural models were constructed by molecular dynamics (MD) and reverse Monte-Carlo (RMC) simulations, and the RDFs calculated from the simulations were compared with that observed. It was found that, in the three films, the average oxygen coordination numbers around the In and Zn ions were almost 6 and 4, respectively. It was concluded that the atomic arrangements of amorphous In₂O₃–ZnO were characterized by the increase in the number of distribution of the corner-sharing In–O–Zn bonds as compared with crystalline In₂O₃.