Microstructure and tribology of TiC(Ag)/a-C:H nanocomposite coatings deposited by unbalanced magnetron sputtering

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• 作者：Yunfeng Wang^a ; Jun Wang^a ; Guangan Zhang^b ; Liping Wang^b ; ^{lpwang@licp.cas.cn} ; Pengxun Yan^a
• 关键词：Nanocomposite ; TiC(Ag)/a-C ; H ; High vacuum ; Superlow friction
• 刊名：Surface and Coatings Technology
• 出版年：2012
• 期刊代码：106_02578972
• 类别：ms
• 出版时间：15 March, 2012
• 卷：206
• 期：14
• 页码：3299-3308
• 文件大小：2745 K

摘要

TiC(Ag)/a-C:H nanocomposite coatings with various Ag concentrations were fabricated on Si p(100) substrates. The composition and structure of as-deposited nanocomposite coatings were systemically investigated, and the friction and wear behaviors were also evaluated under the ambient, high temperature and high vacuum, respectively. Results show that the TiC nanocrystallites were formed in the amorphous hydrogenated carbon matrix near the substrate. The co-dopant Ag possessed nanocrystalline structure in the as-fabricated coatings whilst it formed Ag clusters (10-50 nm) on the surface. Furthermore, the introduction of Ag caused a significant reduction in the residual compressive stress without considerable decrease of the hardness and improved the adhesive strength of nanocomposite coatings. Tested as-deposited and after annealed at 500 掳C coatings, the TiC(Ag)/a-C:H coatings showed a reduction of friction coefficients and wear rates with increment of Ag concentration. Under high vacuum condition, the TiC(Ag)/a-C:H coatings presented superlow friction behavior where the friction coefficient was reduced from 0.01 to 0.005 and lifetime increased from 0 to 1500 cycles. The significant improvement in tribological properties was mainly attributed to the low shear strength of Ag clusters on the surface as well as Ag diffusion to surface and wear track of coatings. The superior friction and wear behaviors of TiC(Ag)/a-C:H coatings make them good candidates as solid lubrication materials in space and aircraft applications.