摘要
Thin films of Ca-modified lead titanate were fabricated by sol-gel processing. The complex alkoxides were prepared by reacting lead acetate and calcium chloride with titanium tri-isopropoxide mono-acetylacetonate. Titanium tri-isopropoxide mono-acetylacetonate was synthesized by addition of acetylacetone to titanium tetra-isopropoxide as a chelating agent. Thin films were deposited on Si(100), MgO(100) and Pt/MgO(100) substrates by dip-coating. X-ray diffraction analyses were carried out for thin films to investigate crystalline phases, crystallographic orientation and lattice parameters. Thin films deposited on all the substrates used exhibited perovskite single phase. Conditions for obtaining homogeneous crack-free thin films were determined.