Deposition of diamond-like carbon thin films containing photocatalytic titanium dioxide nanoparticles

详细信息	查看全文 | 推荐本文 |

• 作者：Masahito Ban ; ^{ban@nit.ac.jp} ; Naoya Hasegawa¹
• 关键词：Plasma CVD ; Diamond-like carbon ; Titanium dioxide ; Photocatalyst ; Nanoparticles
• 刊名：Diamond and Related Materials
• 出版年：2012
• 期刊代码：30_09259635
• 类别：ms
• 出版时间：May, 2012
• 卷：25
• 期：Complete
• 页码：92-97
• 文件大小：826 K

摘要

Diamond-like carbon (DLC) thin films containing photocatalytic titanium dioxide (TiO₂) nanoparticles were deposited by the plasma chemical vapor deposition method, which was developed by our group, using a colloidal solution as the precursor. It was found from the results of Raman spectroscopy, SEM observation and surface analyses that a bias voltage applied to the substrate had considerable effect on TiO₂ nanoparticle inclusion in the matrix DLC thin film, and the optimal bias voltage was in the range from 鈭?#xA0;50 to 鈭?#xA0;175 V. The depth profiling with Auger electron spectroscopy for the DLC thin film deposited at the bias voltage of 鈭?#xA0;100 V suggested that TiO₂ nanoparticles were contained not only on the surface but also inside of the matrix thin film. To evaluate the photocatalytic properties of the deposited DLC thin films, methylene blue degradation, contact angle measurement, and antibacterial tests were performed. The results indicated that the DLC thin film containing TiO₂ nanoparticles exhibited the abilities to decompose methylene blue dye, make the surface more hydrophilic and kill Escherichia coli cells under ultraviolet light irradiation.