GaAs Medipix2 hybrid pixel detector
- 作者：Pasi Kostamo ; Seppo Nenonen ; Sami Vä ; hä ; nen ; Lukas Tlustos ; Christer Frö ; jdh ; Michael Campbell ; Yuri Zhilyaev ; Harri Lipsanen
- 关键词：GaAs ; Medipix2 ; X-ray imaging
- 刊名：Nuclear Instruments and Methods in Physics Research Section A ; Accelerators ; Spectrometers ; Detectors and Associated Equipment
- 出版年：2008
- 期刊代码：41_01689002
- 类别：ph
- 出版时间：11 June 2008
- 卷：591
- 期：1
- 页码：174-177
- 文件大小：344 K
摘要
A GaAs Medipix2 hybrid pixel detector based on high purity epitaxial GaAs material was successfully fabricated. The mesa type GaAs sensor with 256×256 pixels and total area of 1.4×1.4 cm2 was made of a 140-μm-thick epitaxial p–i–n structure utilizing reactive ion etching. A final thickness of approximately 110 μm for the all-epitaxial sensor element is achieved by back-thinning procedure. The sensor element is bump bonded to a Medipix2 read-out ASIC. The detector is capable of room temperature spectroscopic operation and it demonstrates the potential of GaAs for high resolution X-ray imaging systems operating at room temperature. This work describes the manufacturing process and electrical properties of the GaAs Medipix2 hybrid detector.