Reel-to-reel deposition of epitaxial double-sided Y₂O₃ buffer layers for coated conductors

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• 作者：Yudong Xia ; Jie Xiong ; ^{jiexiong@uestc.edu.cn} ; Fei Zhang ; Junfei Zhang ; Lili Wang ; Yan Xue ; Yaxin Xu ; Pei Guo ; Xiaohui Zhao ; Bowan Tao ; ^{taobw@uestc.edu.cn} ; Yanrong Li
• 关键词：Double-sided ; Buffer layers ; Reactive sputtering
• 刊名：Physica C
• 出版年：2012
• 期刊代码：80_09214534
• 类别：ms
• 出版时间：June, 2012
• 卷：476
• 期：Complete
• 页码：48-53
• 文件大小：2513 K

摘要

Y₂O₃ films were deposited on both sides of biaxially textured Ni-5 at.%W substrates by reel-to-reel DC. magnetron reactive sputtering, serving as a seed layer for high performance coated conductors. The deposition parameters, such as water vapor pressure, substrate temperature and sputtering power, were systematically studied. The YSZ layer and CeO₂ layer were fabricated on Y₂O₃ buffered Ni-W tapes using the same deposition system. X-ray diffraction analysis confirmed that optimized double-sided CeO₂/YSZ/Y₂O₃ buffer layers showed a significant improvement in in-plane and out-of-plane texture. Atomic force microscope revealed a smooth, dense and crack-free surface morphology. YBa₂Cu₃O_7-未 films grown on double-sided CeO₂/YSZ/Y₂O₃ buffered Ni-W tapes by D.C. sputtering exhibited a critical current density of 1.26 MA/cm² at 77 K for each side.