Self-Organized Formation of Short TiO₂ Nanotube Arrays By Complete Anodization of Ti Thin Films

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• 作者：Masahisa Okada ; ^{m-okada@aist.go.jp} ; Kazuki Tajima ; Yasusei Yamada ; Kazuki Yoshimura
• 关键词：61.46.Fg ; 81.07.Nb ; 82.45.Yz
• 刊名：Physics Procedia
• 出版年：2012
• 期刊代码：P128_18753892
• 类别：ph
• 出版时间：2012
• 卷：32
• 期：Complete
• 页码：714-718
• 文件大小：1007 K

摘要

We investigate the self-organized growth of short TiO₂ nanotubes by complete anodization of Ti thin films deposited on Si substrates in ethylene glycol electrolytes with small addition of NH₄F. During the anodization process, real-time inspection of the current transient is performed to anodize the Ti films completely. X-ray photoelectron spectroscopy and scanning electron microscopy are employed to characterize the resulting samples. We find that the length of the formed TiO₂ nanotubes is governed by the thickness of Ti thin films independently of the tube diameter. Short TiO₂ nanotubes are also found to be stable up to 550 掳C in air atmosphere even after crystallization to rutile.