Microstructure of diamond-like carbon films prepared by cathodic arc deposition

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• 作者：Kimura ; Ayako ; Azuma ; Yasushi ; Suzuki ; Tetsuya ; Saito ; Tomohiro ; Ikuhara ; Yuichi
• 关键词：Amorphous carbon ; Physical vapor deposition ; Chemical bonding ; Microstructure
• 刊名：Diamond and Related Materials
• 出版年：2002
• 期刊代码：30_09259635
• 类别：ms
• 出版时间：July, 2002
• 卷：11
• 期：7
• 页码：1436-1440
• 文件大小：598 K

摘要

Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp³/sp² ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp³/sp² ratio, compared with those under vacuum, argon and methane circumstances.